European unions network of excellence in rf mems amicom. After years of trials and tribulations from all corners of the industry to nail down the technology, two mems. The second approach is based on an interdigital horizontal design. Theory, design, and technology kindle edition by rebeiz, gabriel m download it once and read it on your kindle device, pc, phones or tablets. Design of dccontact rf mems switch with temperature. Theory, design, and technology book online at best prices in india on. Examples of consolidated market exploitations of mems sensors and actuators are also provided. Practical and theoretical coverage of rf mems for circuits and devices. The most common technology platforms for microsystems manufacturing are reported. Introduction to rf mems switch working and its applications. A novel manufacturing technology for rf mems devices on. This is the first comprehensive book to address the design of rf memsbased circuits for use in high performance wireless systems. A tunable capacitor based on mems technology is presented in this paper. The spring constant of nonuniform serpentine flexure with different meander sections have been equated by analytical expression and verified with finite element method fem.
Radiofrequency microelectromechanical system wikipedia. Ultrasmall radio frequency and microwave microelectromechanical systems rf mems, such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. Mems for radio frequency passives, are introduced, explaining their working principles and listing diverse actuation mechanisms. A groundbreaking research and reference tool, the book enables you to understand the realm of applications of rf mems technology. A fellow of the ieee and a consultant to rockwell, samsung, intel, standard mems, and agilent, he has published extensively in the field of microwave technology and in the area of rf mems. Capacitive rf mems switch design and simulation anil pandey. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. The proposed structure consists of two fixedfixed parallel movable plates with 4 supports. Use features like bookmarks, note taking and highlighting while reading rf mems. A tunable capacitor based on mems technology for rf. Minhang bao, analysis and design principles of mems devices, department of electronic. For those who wish to read more about rf mems technology and applications, the book by gabriel rebeiz, rf mems theory, design and technology rebeiz, 2003 is recommended for anyone who approaches these components for.
This book acquaints readers with the basics of rf mems and. The novelty introduced for phase shifter design in this case is scaling down of the lateral dimensions of the conventional rf mems shunt switch by 10 times. This book acquaints readers with the basics of rf mems and describes how to design. Rf mems circuit design for wireless communications.
Design of miniaturized rf mems based singlebit phase shifter. In many cases, such rf mems components would not only substantially reduce size, weight, and power consumption, but also. Radio frequency micro electro mechanical switches rf mems classification depends on the type of actuation, deflection axis, contact type, circuit configuration, and structure configuration. He was at the university of michigan, ann arbor, and is now a professor of electrical and computer engineering at the university of california, san diego. On characterization of symmetric type capacitive rf mems. An introduction to mems prime faraday technology watch january 2002 2 mems, an acronym that originated in the united states, is also referred to as microsystems technology mst in europe and micromachines in japan.
Everyday low prices and free delivery on eligible orders. Ultrasmall radio frequency and microwave microelectromechanical platforms rf mems, similar to switches, varactors, and part shifters, convey approximately 0 energy intake or loss. New rf and microwave frequency mems microelectromechanical systems have potentially enormous and widespread applications in the telecommunications industry. This paper presents the design, fabrication and characterization of capacitive type mems switch for space and terrestrial communication applications. Design and optimization of aln based rf mems switches. Regardless of terminology, the uniting factor of a mems device is in the way it is made. Hence, in terms of overall area coverage, 100150 times reduction can be achieved. Components based on this technology such as switches, varactors, and phase shifters exhibit virtually no power consumption or loss, making them ideally suited for use in modern. The presented design here is electrostatically actuated.
Design of microsystems accelerometers gyroscopes rf mems optical. Rf functionality can be implemented using a variety of rf technologies. Ansari h and khosroabadi s 2019 design and simulation of a novel rf mems shunt capacitive switch with a unique spring for kaband application, microsystem technologies, 25. Besides rf mems technology, iiiv compound semiconductor gaas, gan, inp. The rf mems devices described have been full designed, fabricated, and tested at microelectronic research lab of optel consortium. Rf mems devices for communication systems sciencedirect. Get your kindle here, or download a free kindle reading app. This paper presents a novel design of singlebit rf mems phase shifter. The cpw transmission line is fabricated on the 500. Theory, design, and technology kindle edition by gabriel m.
The actuation voltage of the rf mems switch is the most important for compatible with modern electronic control circuits and improve lifetime. Rf mems theory design and technology pdf semantic scholar. The mems switch consists of mechanical support, cpw coplanar waveguide and actuation section. Practical and theoretical coverage of rf mems for circuits and devices new rf and microwave frequency mems microeletromechanical. Reliability of rf mems capacitive and ohmic switches for space redundancy configurations. Download it once and read it on your kindle device, pc, phones or tablets. Theory, design, and technology wiley online library. Practical and theoretical coverage of rf mems for circuits and devices new rf and microwave frequency mems microelectromechani cal systems have potentially enormous and widespread applications in the telecommunications industry. These switches are the unambiguous micro mechanical switches that are intended to operate at rf to mm wave frequencies, which mean 0. Movability of two plates makes it possible to actuate the plates with a small voltage. Development of rf mems switches for high power applications. The most used rf mems mechanical structures are the cantilever beam and the air bridge structures. In particular, as the potential of rf mems to enable the implementation of. Spasos, rf mems switch for reconfigurable antennas, phd thesis, school of engineering and design, brunel university, july 2011.
Design is carried out by electromechanical and electromagnetic simulation of rf mems. Mems varactors and tunable oscillators rf mems wiley. Radio frequency micro electro mechanical switches rf mems classification depends on type of actuation, deflection axis, contact type, circuit configuration, and structure configuration. A radiofrequency microelectromechanical system rfmems is a microelectromechanical system with electronic components comprising moving submillimetersized parts that provide radiofrequency rf functionality. When the actuation is applied, two plates move together and their distance is decreased, hence the capacitance is increased. Theory, design, and technology research and markets.
An introduction to mems microelectromechanical systems. Huikai xie most figures and data in this lecture, unless cited otherwise, were taken from rf mems theory, design and technology by g. Mechanical support is made of gold and made up of the anchor, the beam and the suspended electrode. Rebeiz ultrasmall radio frequency and microwave microelectromechanical systems rf mems, such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. The rf mems switches are frequently used in microwave and radio frequency communication devices, such as transmitters and receivers, mode selection switch, antenna switch, etc. The deviation in measured actuation voltage and rf response of the switches are discussed in terms of the process variation which occurred unintentionally during the fabrication of devices. The third approach consists of building a fixed capacitance bank and using mems switches to select the required total capacitance. Electromechanical design consists of an fem modeling of micromechanic structures.
490 1054 234 900 478 607 1072 1309 982 1096 372 583 41 619 91 330 1313 36 424 358 429 85 1134 1356 634 694 336 1326 1189 1208